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Micro/Nano Processing Technology >> Content Detail



Lecture Notes



Lecture Notes

This section contains documents that could not be made accessible to screen reader software. A "#" symbol is used to denote such documents.

The instructor for each lecture is provided below according to the following key:

MAS = Martin Schmidt
RCOH = Robert O' Handley
SR = Susan Ruff

A note on CI-M: CI-M refers to the "Communication Intensive in the Major" requirement for juniors and seniors. CIM courses practice forms of communication that are specific to the professional and academic culture of the discipline.

LEC #topicsLecturerS
1Overview/Safety/Lab Assignment (PDF)

CI-M: Introduction to CI-M
MAS

SR
2IC Lab - Overview (PDF)MAS
3OxidationMAS
4Diffusion (PDF - 4.5 MB)#RCOH
5IC Lab: Testing (PDF)

CI-M: Writing Technical Reports (PDF)
MAS

SR
6Diffusion/Implantation (PDF)#RCOH
7MEMS Lab: Overview (PDF)#MAS
8Vacuum System (PDF)RCOH
9CVD (PDF)RCOH
10Sputtering (PDF)

CI-M: Feedback on IC Report, Reports Returned (PDF)
RCOH

SR
11Fluids Lab: OverviewMAS
12Evaporation (PDF - 2.6 MB)#RCOH
13MEMS Lab: Testing (PDF - 1.6 MB)MAS
14LithographyMAS
15Lithography, Soft LithographyMAS
16Etching (Wet) (PDF - 3.5 MB)RCOH
17Etching (Dry) (PDF)RCOH
18CMOSMAS
19Advanced Silicon DevicesMAS
20Fluids Lab: Testing (PDF)MAS
21Take Home Introduction / Patents (PDF)MAS
22Take Home Discussion (PDF)MAS
23Advanced Topics (Guest)
24Advanced Topics (cont.) (Guest)
25Analog Devices Fab Tour

 








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