Table of Contents
Labs
Labs
This page presents information on some of the primary techniques used in the lab portion of this class. All photographs are courtesy of Dr. Aranyosi.
Casting PDMS (PDF)
Casting Masters (PDF)
Coulter Counter (PDF)
Plasma Bonding (PDF)
Device Fabrication (PDF)
Filling Devices (PDF)
Reservoirs (PDF)
Tray of circular silicon wafers.
A cube-shaped metal device with a door on the front.
Very clean circular wafers are removed from the cleaner.
Man in clean suit inspects clean wafers.
Close-up of clean, reflective, semi-metallic wafers.
Student adjusting microscope to inspect wafer.
Brown bottle of SU-8 (2035).
Small glob of SU-8 is poured onto the wafer.
Glob of SU-8 on wafer.
Wafer is carefully transferred to a hot plate.
Wafer is transferred to a larger, also-circular wafer.
Student leaning over to place wafers onto hot plate.
Stack of two wafers sitting on hot plate.
Two hot plates side by side, one with wafers.
Students examine thin plastic sleeve.
Mask clamped in place, aligned over wafer.
Circular tray slides beneath where mask is held.
Flexible plastic circle is placed carefully onto tray.
Plastic circle is adjusted with forceps.
Wafer is carefully placed atop plastic circle.
Plastic is held in place by small clamp.
Students in goggles watch as UV light irradiates masked wafer.
UV light shines through transparencies in mask, onto wafer.
UV device shown from another angle.
Label on the bottle of SU-8 developer.
Wafer submerged in SU-8 developer; pattern apparent.
Wafer is laid flat and blown dry with nitrogen gas.
Center of wafer smooth and dry; edges rippled with moisture.
Stream of nitrogen gas dries center of wafer first.
Close-up of drying wafer.
Dried wafer with pattern clearly visible.
Students view magnified wafer patterns on video microscope.
Close-up of wafer pattern on video microscope screen.
Close-up of wafer pattern on video microscope screen.
Wafer with abnormal pattern.
Detailed features of a wafer magnified on video microscope screen.
Wafer placed beneath microscope lens, image appears on side screen.