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Course Info

  • Course Number / Code:
  • 6.774 (Fall 2004) 
  • Course Title:
  • Physics of Microfabrication: Front End Processing 
  • Course Level:
  • Graduate 
  • Offered by :
  • Massachusetts Institute of Technology (MIT)
    Massachusetts, United States  
  • Department:
  • Electrical Engineering and Computer Science 
  • Course Instructor(s):
  • Prof. Judy Hoyt

    Contributor:
    Prof. L. Rafael Reif 
  • Course Introduction:
  •  


  • 6.774 Physics of Microfabrication: Front End Processing



    Fall 2004




    Course Highlights


    This course features a full set of audio lectures in the lecture notes section. In addition, a number of assignments are available.


    Course Description


    This course is offered to graduates and focuses on understanding the fundamental principles of the "front-end" processes used in the fabrication of devices for silicon integrated circuits. This includes advanced physical models and practical aspects of major processes, such as oxidation, diffusion, ion implantation, and epitaxy. Other topics covered include: high performance MOS and bipolar devices including ultra-thin gate oxides, implant-damage enhanced diffusion, advanced metrology, and new materials such as Silicon Germanium (SiGe).


    Special Features




    Technical Requirements


    RealOne™ Player software is required to run the .rm files found on this course site.

     

ACKNOWLEDGEMENT:
This course content is a redistribution of MIT Open Courses. Access to the course materials is free to all users.






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