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Course Info

  • Course Number / Code:
  • 6.777J (Spring 2007) 
  • Course Title:
  • Design and Fabrication of Microelectromechanical Devices 
  • Course Level:
  • Graduate 
  • Offered by :
  • Massachusetts Institute of Technology (MIT)
    Massachusetts, United States  
  • Department:
  • Electrical Engineering and Computer Science 
  • Course Instructor(s):
  • Prof. Carol Livermore
    Prof. Joel Voldman 
  • Course Introduction:
  •  


  • 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices



    Spring 2007




    Course Highlights




    6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices



    Spring 2007


    Prototype design of a microsystem cooler.
    An illustration of the prototype design of a microsystem cooler that is being fabricated at the NASA Glenn Research Center. The microsystem cooler is suited mostly to volume-limited applications that require cooling below the ambient or sink temperature. (Image courtesy of NASA Glenn Research Center.)


    Course Description


    6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points.

    Recommended Citation


    For any use or distribution of these materials, please cite as follows:

    Carol Livermore and Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].



    Technical Requirements


    Special software is required to use some of the files in this course: .m.

     

ACKNOWLEDGEMENT:
This course content is a redistribution of MIT Open Courses. Access to the course materials is free to all users.






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