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Course Info

  • Course Number / Code:
  • 6.781J (Spring 2006) 
  • Course Title:
  • Submicrometer and Nanometer Technology 
  • Course Level:
  • Graduate 
  • Offered by :
  • Massachusetts Institute of Technology (MIT)
    Massachusetts, United States  
  • Department:
  • Electrical Engineering and Computer Science 
  • Course Instructor(s):
  • Prof. George Barbastathis
    Prof. Karl Berggren
    Prof. Henry Smith 
  • Course Introduction:
  •  


  • 6.781J / 2.391J Submicrometer and Nanometer Technology



    Spring 2006




    Course Highlights


    This course features a complete set of assignments and demonstration videos.


    Course Description


    This course surveys techniques to fabricate and analyze submicron and nanometer structures, with applications. Optical and electron microscopy is reviewed. Additional topics that are covered include: surface characterization, preparation, and measurement techniques, resist technology, optical projection, interferometric, X-ray, ion, and electron lithography; Aqueous, ion, and plasma etching techniques; lift-off and electroplating; and ion implantation. Applications in microelectronics, microphotonics, information storage, and nanotechnology will also be explored.



    Acknowledgements


    The Instructors would like to thank Bob Barsotti, Bryan Cord, and Ben Wunsch for their work on the Atomic Force Microscope video. They would also like to thank Bryan Cord for creating each video.



    Special Features




    Technical Requirements


    Special software is required to use some of the files in this course: .mov.

     

ACKNOWLEDGEMENT:
This course content is a redistribution of MIT Open Courses. Access to the course materials is free to all users.






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