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Micro/Nano Processing Technology >> Content Detail



Calendar / Schedule



Calendar

The calendar below provides information on the course's lecture, lab, and quiz sessions. In addition, the instructor for each session is given according to the following key:

MAS = Martin Schmidt
RCOH = Robert O' Handley
SR = Susan Ruff


LEC #TOPICSLABSKEY DATES
1Overview/Safety/Lab Assignment (MAS)

CIM: Introduction to CIM (SR)
Homework 1 out
2IC Lab - Overview (MAS)IC-1: Gate Oxide/Poly
3Oxidation (MAS)Homework 1 due

Homework 2 out
IC-2: Backside Etch
4Diffusion (RCOH)Homework 2 due

Homework 3 out
5IC Lab: Testing (MAS)

CIM: Writing Technical Reports (SR)
IC-3: TestIC lab report out
6Diffusion/Implantation (RCOH)
7MEMS Lab: Overview (MAS)MEMS-1: PhotolithHomework 3 due

IC lab report due (in lab)
8Vacuum System (RCOH)Homework 4 out
9CVD (RCOH)
10Sputtering (RCOH)

CIM: Feedback on IC Report, Reports Returned (SR)
MEMS-2: KOH EtchHomework 4 due

Homework 5 out
Quiz 1: Through CVD (Staff)
11Fluids Lab: Overview (MAS)Fluids-1: Photolith
12Evaporation (RCOH)Revised IC report due
13MEMS Lab: Testing (MAS)MEMS-3: TestHomework 5 due

MEMS lab report out
14Lithography (MAS)Homework 6 out

Revised IC report returned
15Lithography, Soft Lithography (MAS)
16Etching (Wet) (RCOH)Homework 6 due

Homework 7 out
17Etching (Dry) (RCOH)Fluids-2: MoldingMEMS lab report due
18CMOS (MAS)Homework 7 due

Homework 8 out
19Advanced Silicon Devices (MAS)
20Fluids Lab: Testing (MAS)Homework 8 due

Take home exam out
21Take Home Introduction / Patents (MAS)Fluids-3: TestFluids lab report out
Quiz 2: Through Advanced Silicon Devices (Staff)
22Take Home Discussion (MAS)
23Advanced Topics (Guest)Fluids lab report due
24Advanced Topics (cont.) (Guest)
25Analog Devices Fab TourTake home quiz due

 








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